Coating Equipment

Plasma Etching De-coater RIE-240

The RIE-240 decoater is an Reactive Ion Etching (RIE) system that uses RF power supply to generate a glow discharge plasma to remove Carbon-based coatings (Plasma Etch). The decoating system is a perfect combo for our FCVA load-lock mould coater for a turnkey solution for your mould coating and decoating process.

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  • User Friendly
    Control Panel

    Easy to operate and control

  • Automotive

    For pumping, venting and interlock monitoring

  • Plasma

    Wide material compatibility


Configuration Description
Chamber Internal Dimension Ø 0.24 x 0.2 m
Chamber Material SUS 304
Substrate Loading Manual Sliding
Reactor Type Cavity Chamber Reaction
Vacuum Range 4 - 120 Pa
Etching Time ≈ 15 min for 100 nm (May vary for different shapes and sizes)
Gas Channel 2 Channels with Mass Flow Controllers
Process Gas Type O2
Purge Gas N2
System Vent Gas N2
System Dimension ≈ 0.6 (L) x 0.8 (W) x 2.0 (H) m


Frequently Asked Questions

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  • What substates can your coating equipment coat? 

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