Coating Equipment

FCVA Hybrid Batch System / BFSI 1006

The BFSI 1006 system combines the state-of-the-art Filtered Cathodic Vacuum Arc (FCVA) thin film coating technology with our in-house anode layer ion beam, source body magnetron sputtering system and hand-picked pulsed bias. It also includes double-bend magnetic filtration system. The system obtains 100% pure charged ions through plasma screening and it ensures the consistent uniformity and density of the coated film, result in improved wear resistance of the film layer. In addition, the system is fully automated with user-friendly monitoring system and simple operation procedures for production efficiency and consistent quality. 

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  • FCVA

    Excellent coating performance

  • Carbon or Metal

    Extend coating types

  • Ion Beam
    or Sputtering

    Flexible configuration

  • High Vacuum

    Minimise vacuum pump waiting time

  • Rotating Substrate

    Allows angle tilt

  • User Friendly
    Control Panel

    Easy to operate and control



Process Chamber with Multi-Source Dimension 1.0 (Ø ) x 0.6 (H) m
Material SUS 304
FCVA Source Multiple FCVA metal and Carbon Sources
Other Sources Optional Magnetron Sputter Source and Ion Beam Cleaning Source
Vacuum Control 2pcs x TC Gauge,  1pc x Ion Gauge
High Vacuum Pump Optional - 1,600 / 2,000 / 3,600 L/s Turbo Molecular Pump
Pressure Control Capacitance Manometer, Multiple MFCs
Mechanical Pump (Roughing) 60m³ / Two-Rotary Vane Pump, 1 to 2 sets
Ultimate Vacuum < 1.0 x 10-4 Pa
Substrate Holder Dimension 0.8 (Ø ) x 0.4 (H) m
Material SUS 304
Function Holder Rotation Speed 0 - 10 rpm, Bias-able
System Dimension ≈ 4.6 (L) x  3.6 (W) x 2.2 (H) m

Frequently Asked Questions

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  • What substates can your coating equipment coat? 

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