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Extend Lapping Carrier Lifespan with ta-C Coating

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Extend the Life of Lapping Carrier Using Durable Hard Carbon Coating

Coatings for Lapping Carrier

In semiconductor manufacturing, lapping carriers play a critical role in holding and aligning silicon wafers during the polishing process. They ensure dimensional accuracy, surface flatness, and smoothness all vital for downstream lithography and packaging processes. To withstand the mechanical stress during lapping, these carriers are typically coated with Diamond-Like Carbon (DLC) or similar hard coatings.

Customer Problem

However, over time, the DLC coating wears out due to repeated abrasion, slurry interaction, and thermal cycling, especially under high-volume production. This wear compromises the carrier’s ability to maintain consistent wafer positioning and increases the risk of contamination or breakage. As a result, manufacturers are forced to replace carriers frequently, driving up operational costs, increasing downtime, and disrupting production schedules.

Our Solutions

NTI offers a metal-free ta-C coating solution that extends the lifespan of lapping carriers used to align wafers during polishing. Through precise ion beam etching, worn DLC coatings are removed without damaging the carrier’s structure. A new ta-C layer is then applied using Filtered Cathodic Vacuum Arc (FCVA) technology, providing a hard, low-friction surface that ensures stable wafer alignment and smooth release without introducing metal contamination.

Key Benefits

  • Cost Savings

    Refurbishment extends carrier life and reduces replacement frequency

  • Enhanced Durability

    Increases hardness (~3000 Hv), wear resistance, and surface consistency

  • Sustainable Solutions

    Recycling used carriers minimizes material waste and environmental impact

Semiconductor Brochure Download

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Frequently Asked Questions

  • What is a lapping carrier and why does it need a coating?

    Lapping carriers are fixtures used to hold and support substrates during lapping or polishing. A protective coating improves wear resistance, prevents contamination, and extends carrier life.

  • What type of coating is best for lapping carriers?

    Hard, low-friction coatings such as Diamond-Like Carbon (DLC), FCVA coatings, or custom PVD coatings are ideal for lapping carriers due to their durability.

  • How does coating a lapping carrier improve processing quality?

    Coatings minimize particle contamination, improve surface uniformity, reduce carrier warping, and allow for better dimensional control during lapping.

  • Can used lapping carriers be recoated or refurbished?

    Yes. NTI Nanofilm offers stripping and recoating services to restore performance and extend the usable life of your carriers.

  • Is your lapping carrier coating compatible with metal material carriers?

    Yes. Our coating solutions are suitable for a range of substrates including stainless steel.

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