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FCVA Load-Lock Coating System

The Load-Lock coating system has separate chambers for load-lock and deposition process, that minimise the waiting time for vacuum pumping. It is an ideal system for coating particle-free glass lens molds and smaller components. It can be equipped with both carbon and metal sources. With our TAC-ON® materials, this mould coater deposits one of the best Diamond-Like Carbon (DLC) coatings onto high precision optical molds by key global lens makers in the world.

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Features

  • FCVA

    Excellence coating
    performance

  • Carbon or Metal
    Source

    Extend coating types

  • Ion Beam
    or Sputtering

    Flexible configuration

  • Separate Vacuum
    Chambers

    Minimise vacuum
    pump waiting time

  • Rotating Substrate
    Holder

    Allows angle tilt

  • User Friendly
    Control Panel

    Easy to operate and control

Specification

Configuration Description
Vacuum Chambers Separated Load-Lock and Process Chambers
FCVA Carbon Source FS2 Fully-Automated TAC-ON®
FCVA Metal Source Available based on applications
Magnetron Sputter Source Available based on applications
lon Beam Source lon Bombardment on High-Energy Argon lons
Substrate Holder Self-Rotating, Bias-able, Coating Range up to Ø300mm   (6’’, 10’’ and 12’’)
High Vacuum Pump > 2000 litre/sec (Process Chamber) 600 litre/sec (Load-Lock Chamber)
Mechanical (Roughing) 40 m³/hr Two-Stage Rotary Vane Pump
Control Cabinet Air-Cooling 19"Cabinet
Pressure Control lon Gauge and Thermocouple Pressure Gauge, Dual MFC Flow Control
System Controls PLC Control, Safety Interlocks, PC and Touchscreen Interface
View Port Ø 100 mm with Shutter on Chamber Door
System Dimension ≈ 1.7 (L) x 1.2 (W) x 2.0 (H) m

Applications

  • Optics

Other Coating Equipment

Frequently Asked Questions

  • What are the main advantages of Nanofilm coating equipment? 

    We have been engineering, designing, and manufacturing vacuum coating / physical vapor deposition (PVD) / thin-film coating equipment for over 25 years and are a leader in the field. We are an integrated player providing both coating equipment and coating services. Our experiences in coating services provide first-hand knowledge that translate to state-of-the-art equipment that fit your production needs. We are your one-stop partner that provide equipment, deposition source materials, vaporization source, spare parts and after sales services.

  • What are the vaporization methods of your coating equipment? 

    Our equipment portfolio includes ion-beam, magnetron sputtering, filtered cathodic vacuum arc (FCVA) PVD vaporization method. The filtered cathodic vacuum arc (FCVA) is our proprietary technology, a plasma-based vaporization method that provide better control and more uniformed coating on a wide range of substrates.

  • What substates can your coating equipment coat? 

    Our equipment can coat a wide range of substrates including metal (stainless steel, copper, aluminium), alloy, polymer (plastic), ceramics.

  • What is the substrate maximum size?  

    We provide coating equipment with chamber size as big as 1.5m x 1.5m. The maximum size of substrate depends on the shape. Please get in touch with us to learn more.

  • What type of coating can your equipment coat? 

    Our equipment can coat diamond-like coating, optical filter coating, anti-reflective coating, conductive coating, and hydrophobic coating, multi-layer composite coating. 

  • What is your lead time?  

    Lead time varies depending on your specification. Please get in touch to learn more.

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