Enhancing Elastomer Seals Semiconductor Equipment with TAC-ON® Coatings

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Enhancing Elastomer Seals Semiconductor Equipment with TAC-ON® Coating

Elastomer Seals for Semiconductor Equipment

Semiconductor manufacturers face critical issues with elastomer seals, including premature wear, chemical degradation, and particle generation. These problems lead to frequent replacements, increased downtime, and potential contamination risks. Balancing seal durability with the need for metal-free solutions to prevent contamination poses a significant challenge in maintaining equipment efficiency and product quality.

Our Solution

NTI's ta-C coatings extend the life and performance of elastomer seals (Door seals, valves, chamber seals, ESC seals, gas inlet/outlet seals), ensuring reliable operation in demanding semiconductor processes.

Key Advantages:
-Increased Wear Resistance: Taber tests show coated elastomers withstand 1000+ cycles without wear, unlike uncoated samples.
-Chemical Resistance: Protects against corrosive etching chemicals (CF4, CHF3, SF6, H2) used in plasma ashing and etching.
-Excellent Adhesion: Cross-cut and bending tests after boiling water immersion show no coating peel-off.
-Smooth Surface: Reduces friction and particle generation, enhancing sealing effectiveness.

Surface Morphology of ta-C coating on Rubber Substrates Optical Microscope Image on NR rubber before (Left) and after (Right) ta-C coating.
Surface Morphology of ta-C coating on Rubber Substrates SEM Image on NR rubber after ta-C coating with magnification of X25 (Left) and X10,000 (Right)

*Based on internal test. Results are subject to changes from different materials under different operating environments.

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